PFA花篮 / IC专用盒 / 包装盒 / 承载器 / 晶舟盒 / 晶圆载具
应用实验：半导体蚀刻部门之酸碱制程中使用、传送晶圆。
PFA花篮的性能优势：
1.耐强酸、强碱和各种有机溶剂
2.金属元素空白值低
3.无溶出和析出
4.耐候性佳、不易应力变形
5.耐磨、抗静电性
6.有优良的化学稳定性
花篮尺寸 | 长x宽x高 | 容量 | 槽间距 | 适 用 晶 圆 |
50mm(2英寸)(有豆) | 142.1(L)x67.8(W)x59.0(H)mm | 25PCS | 4.76mm | 2 inch (Ø50mm) 厚度0.5mm~0.7mm晶圆 |
50mm(2英寸)(无豆) | 142.1(L)x67.8(W)x59.0(H)mm | 25PCS | 4.76mm | 2 inch (Ø50mm) 厚度0.5mm~0.7mm晶圆 |
2.5英寸 | 142(L)x79(W)x73(H)mm | 25PCS | 4.76mm | 2.5 inch晶圆 |
75mm(3英寸) | 142.49(L)x94.36(W)x82.53(H)mm | 25PCS | 4.76mm | 3 inch (Ø75mm)晶圆 |
100mm(4英寸) | 142.24(L)x125.48(W)x114.3(H)mm | 25PCS | 4.76mm | 4 inch (Ø100mm) 厚度0.5mm~0.7mm晶圆 |
100mm(4英寸)(镂空版) | 142.24(L)x125.48(W)x114.3(H)mm | 25PCS | 4.76mm | 4 inch (Ø100mm) 厚度0.5mm~0.7mm晶圆 |
104mm(4.125英寸)(镂空版) | 142.24(L)x125.48(W)x114.3(H)mm | 25PCS | 4.76mm | 4.125″inch(Ø104mm) 厚度0.5mm~0.7mm晶圆 |
125mm(5英寸) | 152.4(L)x142.88(W)x146.05(H)mm | 25PCS | 4.76mm | 5 inch (Ø125mm) 厚度0.5mm~0.7mm晶圆 |
150mm(6英寸) | 143.38(L)x177.8(W)x171.45(H)mm | 25PCS | 4.76mm | 6 inch (Ø150mm)晶圆 |
200mm(8英寸) | 203.2(L)x233.05(W)x218.44(H)mm | 25PCS | 6.35mm | 8 inch (Ø200mm)晶圆 |
200mm(8英寸)(镂空版) | 203.2(L)x233.05(W)x218.44(H)mm | 25PCS | 6.35mm | 8 inch (Ø200mm)晶圆 |
150mm(6英寸) | 178(L)x144(W)x115(H)mm | 25PCS | 4.76mm | 6 inch (Ø150mm)晶圆 |
200mm(8英寸) | 234.19(L)x220.5(W)x159(H)mm | 25PCS | 6.35mm | 8 inch (Ø200mm)晶圆 |
150mm(6英寸) | 177(L)x145(W)x173(H)mm | 12PCS | 9.525mm | 6 inch (Ø150mm)晶圆 |
200mm(8英寸) | 203.05(L)x233.05(W)x218.44(H)mm | 13PCS | 12.7mm | 8 inch (Ø200mm)晶圆 |
300mm(12英寸) | 350(L)x180(W)x320(H)mm | 13PCS | 10mm | 12 inch (Ø300mm)晶圆 |
200mm(8英寸) | 200(L)x228(W)x250(H)mm | 25PCS | 6.35mm | 8 inch (Ø200mm)晶圆 |
150mm(6寸) | 143.38(L)x177.8(W)x171.45(H)mm | 25PCS | 4.76mm | 6 inch (Ø150mm)晶圆 |
178(L)x144(W)x115(H)mm | 25PCS | 4.76mm | 6 inch (Ø150mm)晶圆 | |
177(L)x145(W)x173(H)mm | 12PCS | 9.525mm | 6 inch (Ø150mm)晶圆 | |
200mm(8寸) | 203.2(L)x233.05(W)x218.44(H)mm | 25PCS | 6.35mm | 8 inch (Ø200mm)晶圆 |
234.19(L)x220.5(W)x159(H)mm | 25PCS | 6.35mm | 8 inch (Ø200mm)晶圆 | |
203.05(L)x233.05(W)x218.44(H)mm | 13PCS | 12.7mm | 8 inch (Ø200mm)晶圆 | |
200(L)x228(W)x250(H)mm | 25PCS | 6.35mm | 8 inch (Ø200mm)晶圆 | |
300mm(12寸) | 350(L)x180(W)x320(H)mm | 13PCS | 10mm | 12 inch (Ø300mm)晶圆 |
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